pulsedbias相关论文
Structural and mechanical properties of TiON nanocomposite films deposited on silicon by pulsed bias
Nanocomposite TiON thin films were deposited on p-(100) silicon substrate using a pulsed bias arc ion plating technique ......
Effects of pulsed bias on TiO2 thin films prepared on glass and silicon by arc ion plating and simul
TiO2 thin films were fabricated on glass and p-(100) silicon substrates by arc ion plating.The effects of pulsed negativ......